Thermal Induced Structural Conductivity in LPCVD Polysilicon Film on Silicon Nitride/SiO<sub>2</sub> Capped (100) Silicon
نویسندگان
چکیده
منابع مشابه
High thermal conductivity of a hydrogenated amorphous silicon film.
We measured the thermal conductivity kappa of an 80 microm thick hydrogenated amorphous silicon film prepared by hot-wire chemical-vapor deposition with the 3omega (80-300 K) and the time-domain thermo-reflectance (300 K) methods. The kappa is higher than any of the previous temperature dependent measurements and shows a strong phonon mean free path dependence. We also applied a Kubo based theo...
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ژورنال
عنوان ژورنال: Nepal Journal of Science and Technology
سال: 1970
ISSN: 1994-1412
DOI: 10.3126/njst.v10i0.2901